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Continue to Chat華為將用於製造小於10納米芯片的EUV光刻工具組件申請專利 https://blog.wongcw.com/2022/12/26/%e8%8f%af%e7%82%ba%e5%b0%87%e7%94%a8%e6%96%bc%e8%a3%bd%e9%80%a0%e5%b0%8f%e6%96%bc10%e7%b4%8d%e7%b1%b3%e8%8a%af%e7%89%87%e7%9a%84euv%e5%85%89%e5%88%bb%e5%b7%a5%e5%85%b7%e7%b5%84%e4%bb%b6%e7%94%b3/