https://blog.wongcw.com/2020/10/15/asml%e5%85%ac%e4%bd%88%e6%9c%80%e6%96%b0%e4%b8%80%e4%bb%a3euv%e5%85%89%e5%88%bb%e6%a9%9f3600d%ef%bc%9a%e7%94%9f%e7%94%a2%e6%95%88%e7%8e%87%e5%a2%9e%e5%8a%a018/
ASML公佈最新一代EUV光刻機3600D:生產效率增加18%