https://blog.wongcw.com/2020/02/16/%e5%8f%b0%e7%a9%8d%e9%9b%bb7-6-5nm%e5%b7%a5%e8%97%9d%e4%be%9b%e4%b8%8d%e6%87%89%e6%b1%82%e5%8f%b2%e4%b8%8a%e6%9c%80%e9%ab%98%e9%96%8b%e6%94%af%e7%8b%82%e8%b2%b7euv%e5%85%89%e5%88%bb%e6%a9%9f/
台積電7/6/5nm工藝供不應求史上最高開支狂買EUV光刻機